Frequency-Controlled Wireless Piezoelectric Microactuator for Microfluidic Application

Recently, piezoelectric-driven micro-sized pumps have been developed for applications in microfluidics, biomedical and biochemistry diagnostics, fuel cell systems, drug delivery, and high-power electronics cooling, etc. This study describes a frequency-controlled wireless piezoelectric microactuator for microfluidic applications for highly precise constant flow rate. The piezoelectric microactuator used, Murata®PAZ-10-0080, is modeled based on Bouc-Wen model, where the parameters are estimated using Particle Swarm Optimization (PSO) and then simulated via MATLAB Simulink. Then, the results are verified with experiments. The microfluidic device is designed using Finite Element Modeling (FEM) via COMSOL Multiphysics. An LC circuit that is connected to the piezoelectric microactuator is then designed via COMSOL Multiphysics. Then, the whole structure of the microfluidic device is fabricated based on Microelectromechanical systems (MEMS) fabrication standards. Lastly, the performance of the device is characterized and enhanced using experiments.