This project propose a novel out-of-plane microactuator based
on a bulk-micromachined SMA coil with
a built-in heater that is controlled wirelessly using RF magnetic fields. The
out-of-plane SMA coil will bemicrofabricated
through a
planar process and self-assembled by locally controlled bending of the coil structure. The SMA coil acts as both a resonant heater circuit, which receives RF power wirelessly for heat generation, and avertical actuator structure.
This monolithic approach is aimed to reduce the overall size of the actuator and
heat loss associated with the hybrid device, while
eliminating the need for bonding and assembly processes for SMAintegration. Direct wireless heating of the SMA coil is
expected to improve temporal response and reduce the temperature gradient
of the actuator.
|